VLSI Technology: Fabrication of SiC based MSM structure, Schottky diodes, and resistive devices for extreme environment applications. Study of charge transport properties at metal-semiconductor interface. Electrochemical anodization of Si and SiC wafers for the development of high performance solid state gas sensing technology. Synthesis and characterization of multiple thickness gate oxides for SOC system, High-k gate dielectric stacks charge trapping for CMOS Technology.

Nano Science and Nanotechnology: Growth of crystalline metallic and semiconducting thin films (Ti, SiC, ZnO, and TiO₂) by DC/RF magnetron sputtering for diverse optoelectronic applications. Catalytic activation of metal and semiconducting thin films for hydrogen gas sensing application. Growth of metal oxide thin films for electrochromic applications.